Study on possible root causes of contamination from an incoming PVA brush during post-CMP cleaning-Reference-Cited by-同舟云学术

Study on possible root causes of contamination from an incoming PVA brush during post-CMP cleaning

Published:2019-08 Issue: Volume:77 Page:105921
ISSN:0142-9418
Container-title:Polymer Testing
language:en
Short-container-title:Polymer Testing

Author:

Lee Jung-Hwan,Purushothaman Muthukrishnan,Han Kwang-Min,Ryu Heon-Yul,Yerriboina Nagendra Prasad,Kim Tae-Gon,Wada Yutaka,Hamada Satomi,Hiyama Hirokuni,Park Jin-Goo

Publisher

Elsevier BV

Subject

Polymers and Plastics,Organic Chemistry

Reference30 articles.

1. Study of the cross contamination effect on post CMP in situ cleaning process

2. Effect of Surface Wettability on Frictional Conditions during Scrubbing Using Polyvinyl Acetal Brush

3. Analysis of Particle Removal Mechanism Based on PVA Brush Dynamics in Post-Cu CMP Cleaning;Jeong,2008

4. Investigation of eccentric PVA brush behaviors in post-Cu CMP cleaning

5. Friction force monitoring system in post-CMP cleaning for correlations with process issues;Shin,2011

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