Low equivalent oxide thickness of TiO2/GaAs MOS capacitor
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference27 articles.
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3. Improved electrical properties of Gd2 O3/GaAs capacitor with modified wet-chemical clean and sulfidization procedures;Cheng;J Electrochem Soc,2008
4. n-Channel GaAs MOSFET with TaN/HfAlO gate stack formed using in situ vacuum anneal and silane passivation;Chin;J Electrochem Soc,2008
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