Theoretical study of extreme ultraviolet pellicles with nanometer thicknesses
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Published:2024-06
Issue:
Volume:216
Page:108924
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ISSN:0038-1101
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Container-title:Solid-State Electronics
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language:en
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Short-container-title:Solid-State Electronics
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4. Development and performance of EUV pellicles;Brouns;Adv Opt Techn,2017
5. Van Zwol PJ, Nasalevich M, Voorthuijzen WP, Kurganova E, Notenboom A, Vles D. Pellicle films supporting the ramp to HVM with EUV. Proceedings of the SPIE Photomask Technology and EUV Lithography, 2017 Sep 11-14; Monterey, CA, USA. 10451, p. 104510O. Doi: 10.1117/12.2280560.