Author:
Kranti Abhinav,Ming Chung Tsung,Flandre Denis,Raskin Jean-Pierre
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference42 articles.
1. SOI ‘SIMOX’; from bulk to surface micromachining, anew age for silicon sensors and actuators;Diem;Sensors Actuators A,1995
2. Three-axis SOI capacitive accelerometers with PLL C–V converter;Matsumoto;Sensors Actuators A,1997
3. Low-cost 320×240 uncooled IRFPA using conventional silicon IC process;Ishikawa,1999
4. Afridi MY, Suehle JS, Zaghloul ME, Tiffany JE, Cavicchi RE. Implementation of CMOS compatible conductance-based micro-gas-sensor system. In: Proceedings of European Conference on Circuit Theory and Design (ECCTD’01), 2001. p. 381–4
5. Covington JA, Udrea F, Gardner JW. Resistive gas sensor with integrated MOSFET micro hot-plate based on an analogue SOI CMOS process. In: Proceedings of IEEE Sensors Conference, vol. 2, 2002. p. 1389–94
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