Curvature based feature detection for hierarchical grid refinement in TCAD topography simulations

Author:

Lenz Christoph,Toifl Alexander,Quell Michael,Rodrigues Francio,Hössinger Andreas,Weinbub Josef

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference29 articles.

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3. Fronts Propagating with Curvature Dependent Speed;Osher;J. Comput. Phys.,1988

4. Level Set Methods and Fast Marching Methods: Evolving Interfaces in Computational Geometry, Fluid Mechanics, Computer Vision, and Materials Science;Sethian,1999

5. F. Rodrigues, L.F. Aguinsky, A. Toifl, A. Hössinger, J. Weinbub, Feature Scale Modeling of Fluorocarbon Plasma Etching for Via Structures including Faceting Phenomena, in: Book of Abstracts of the International Workshop on Computational Nanotechnology (IWCN), vol. 254, 2021, pp. 101–102.

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