Subject
Computational Mathematics,General Physics and Astronomy,Mechanics of Materials,General Materials Science,General Chemistry,General Computer Science
Reference72 articles.
1. L.C. Feldman, E.P. Gusev, E. Garfunkel (Eds.), Fundamentals aspects of ultrathin dielectrics on Si-based devices: Towards an atomic-scale understanding, in: Proceedings of the Workshop held in St. Petersburg, August 1997, NATO Science Series 3, High technology, vol. 47, Kluwer Academic Publishers, Dordrecht, 1997
2. General Relationship for the Thermal Oxidation of Silicon
3. G.F. Cerfolini, L. Meda, Physical Chemistry of, in and on Silicon, ISBN 3-540-19049-X, Springer, Berlin, 1989
4. J. Da̧browski, H.J. Müssig, Silicon Surfaces and Formations of Interfaces, ISBN 981-02-3286-1, World Scientific, Singapore, 2000
5. Oxidation of silicon
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