Author:
Da̧browski J.,Zavodinsky V.,Fleszar A.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. Physics of semiconductor devices;Sze,1981
2. Manchanda L. In: Bullis WM, Seiler DG, Diebold AC, editors. Semiconductor characterization. New York: Woodbury; 1996. p. 123
3. Basic science and challenges in process simulation
4. Da̧browski J, Müssig H.-J. Silicon surfaces and formation of interfaces. World Scientific, Singapore, 2000 [www.ihp-ffo.de/chipps/Dbook2000]
5. Osten HJ, Liu JP, Gaworzewski P, Bugiel E, Zaumseil P. Techn Dig IEDM, 2000
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