Basic science and challenges in process simulation

Author:

Dąbrowski J.,Müssig H.-J.,Duane M.,Dunham S.T.,Goossens R.,Vuong H.-H.

Publisher

Springer Berlin Heidelberg

Reference84 articles.

1. H.-J. Müssig and J. Dąbrowski, Physikalische Blätter 11, 1132 (1997).

2. J. Dąbrowski and H.-J. Müssig, http://www.ihp-ffo.de/chipps/chipps.html (1997).

3. The National Technology Roadmap for Semiconductors Semiconductor Industry Association (1997).

4. C. A. Warwick et al., AT & T Techn. Journ. 72, 50 (1993).

5. A.-H. Lo et al., IEEE Electron Device Letters 18, 209 (1997).

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