Author:
Kim Joonwon,Shen Wenjiang,Latorre Laurent,Kim Chang-Jin
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. K. Petersen, Silicon as a mechanical material, in: Proceedings of the IEEE, Vol. 70, No. 5, May 1982, pp. 420–457.
2. M. Sakata, An electrostatic microactuator for electro-mechanical relay, in: Proceedings of the Tech Digest IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, February 1989, pp. 149–151.
3. P.L. Berstrom, T. Tamagawa, D.L. Polla, Design and fabrication of micromechanical logic elements, in: Proceedings of the Tech Digest IEEE Micro Electro Mechanical Systems, Napa Valley, CA, USA, February 1990, pp. 15–20.
4. M.A. Grétillat, P. Thiébaud, N.F. de Rooij, C. Linder, Electrostatic polysilicon microrelays integrated with MOSFETs, in: Proceedings of the IEEE MEMS Workshop, Oiso, Japan, January 1994, pp. 97–101.
5. H. Matoba, T. Ishikawa, C.-J. Kim, R.S. Muller, A bistable snapping microactuator, in: Proceedings of the IEEE MEMS Workshop, Oiso, Japan, January 1994, pp. 45–50.
Cited by
47 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献