An electrostatic microactuator for electro-mechanical relay
-
Published:
Issue:
Volume:
Page:
-
ISSN:
-
Container-title:IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'
-
language:
-
Short-container-title:
Cited by
14 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献