Author:
Corman Thierry,Enoksson Peter,Stemme Go¨ran
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. A Coriolis mass flow sensor structure in silicon;Enoksson;MEMS '96, San Diego, CA, USA,1996
5. Vacuum packaging for microsensors by glass-silicon anodic bonding;Henmi;Sensors and Actuators A,1994
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