1. Global Smart Sensors Market | 2021 - 26 | Industry share, size, growth - mordor intelligence, (n.d.). https://www.mordorintelligence.com/industry-reports/global-smart-sensors-market-industry (accessed September 20, 2021).
2. Reliability of MEMS packaging: vacuum maintenance and packaging induced stress;Choa;Microsyst. Technol.,2005
3. Microsensor packaging;Brand;Microsyst. Technol.,2002
4. Microsystem packaging: lessons from conventional low cost IC packaging;Kelly;J. Micromech. Microeng.,1997
5. Low-cost wafer-level vacuum packaging for MEMS;Gooch;MRS Bull.,2003