Commercial vision of silicon-based inertial sensors-Reference-Cited by-同舟云学术

Commercial vision of silicon-based inertial sensors

Published:1998-04 Issue:1-3 Volume:66 Page:231-236
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Song Cimoo,Shinn Meenam

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Surface micromachined accelerometers;Boser;IEEE J. Solid-State Circuits,1996

2. Surface micromachined z-axis vibratory rate gyroscope;Clark,1996

3. ADXL50-monolithic accelerometer with single conditioning, Datasheet 1;Analog Devices,1993

4. Vibrating silicon microgyroscope;Mochida;Trans. IEEE Jpn.,1996

5. A micromachined vibrating ring gyroscope;Putty,1994

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