Dynamic force balancing for the sense mode of a silicon microgyroscope
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/24/i=9/a=095105/pdf
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1. Commercial vision of silicon-based inertial sensors
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4. Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes
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