Affiliation:
1. Murata Manufacturing Co., Ltd.
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Cited by
2 articles.
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1. Commercial vision of silicon-based inertial sensors;Sensors and Actuators A: Physical;1998-04
2. A tunable vibratory microgyroscope;Sensors and Actuators A: Physical;1998-01