Improving yield, accuracy and complexity in surface tension self-assembled MOEMS

Author:

Syms R.R.A.,Gormley C.,Blackstone S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference71 articles.

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3. Passively aligned hybrid integration of 8×1 micromachined micro-Fresnel lens arrays and 8×1 vertical-cavity surface-emitting laser arrays for free-space optical interconnect;Lee;IEEE Photon. Technol. Lett.,1995

4. Micromachined free-space integrated micro-optics;Wu;Sens. Actuators A,1995

5. Out-of-plane refractive microlens fabricated by surface micromachining;King;IEEE Photon. Technol. Lett.,1996

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