Author:
Sarro P.M.,deBoer C.R.,Korkmaz E.,Laros J.M.W.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Amorphous silicon carbide and its application in silicon micromachining;Klumpp;Sensors Mater.,1994
2. SiC for sensors and high-temperature electronics;Müller;Sensors and Actuators A,1994
3. PECVD silicon carbide for micromachined transducers;Flannery,1997
4. Structural properties of amorphous silicon carbide films by plasma-enhanced chemical vapor deposition;Choi;J. Appl. Phys.,1995
5. Hardness and Young's modulus of amorphous a-SiC thin films determined by nanoindentation and bulge tests;El Khakani;J. Mater. Res.,1994
Cited by
62 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献