Characteristics of a thermal mass-flow sensor in vacuum systems-Reference-Cited by-同舟云学术

Characteristics of a thermal mass-flow sensor in vacuum systems

Published:1998-06 Issue:1 Volume:69 Page:62-67
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Toda Kei,Maeda Yasuko,Sanemasa Isao,Ishikawa Koichi,Kimura Noriyuki

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. The measurement of gases;Thomas;J. Franklin Inst.,1911

2. The boundary-layer mass flowmeter;Laub;Instrum. Control Syst.,1961

3. Measuring small gas flows into vacuum systems;Hawk;J. Vac. Sci. Technol.,1967

4. Thermal mass flowmeter;Benson;Instrum. Control Syst.,1970

5. Characteristics of a thermal gas flowmeter;Komiya;Rev. Sci. Instrum.,1988

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