Study on the steady-state characteristics of the sensor tube of a thermal mass flow meter
Author:
Publisher
Elsevier BV
Subject
Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics
Reference8 articles.
1. A critical evaluation of thermal mass flow meters;Tison;J. Vac. Sci. Technol. A,1996
2. Design of a new sensor for mass flow controller using thin-film technology based on an analytic thermal model;Rudent;J. Vac. Sci. Technol. A,1998
3. Toward understanding the fundamental mechanisms and properties of the thermal mass flow controller;Hinkle;J. Vac. Sci. Technol. A,1991
4. A calibration system for calorimeter mass flow device;Widmer;J. Phys. E: Sci. Instrum.,1992
5. Characteristics of a thermal gas flowmeter;Komiya;Rev. Sci. Instrum.,1998
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