Miniature Liquid Flow Sensor and Feedback Control of Electroosmotic and Pneumatic Flows for a Micro Gas Analysis System
Author:
Affiliation:
1. Department of Science, Kumamoto University
Publisher
Springer Science and Business Media LLC
Subject
Analytical Chemistry
Link
http://www.jstage.jst.go.jp/article/analsci/22/1/22_1_61/_pdf
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4. 4. T. Yamagishi and T. Fujii, in “Microreactor Technology (in Japanese)”, 2005, NTS, Tokyo, 175.
5. Characteristics of a thermal mass-flow sensor in vacuum systems
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