Thermal Flow Sensor With a Bidirectional Thermal Reference
Author:
Affiliation:
1. Sensing System Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan
Funder
JSPS KAKENHI Grant Numbers
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9906516/09850389.pdf?arnumber=9850389
Reference28 articles.
1. Miniature Liquid Flow Sensor and Feedback Control of Electroosmotic and Pneumatic Flows for a Micro Gas Analysis System
2. MEMS sensors for density–viscosity sensing in a low-flow microfluidic environment
3. Hotspot Liquid Microfluidic Cooling: Comparing The Efficiency between Horizontal Flow and Vertical Flow
4. Stick-to-Analyze Zeta Potential Measurement Chip with Integrated Electroosmotic Micropump and Liquid Flow Sensor
5. Design and applications of MEMS flow sensors: A review
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