Author:
Götz A.,Campabadal F.,Cané C.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. Novel structure for miniature pressure transducers obtained by electrochemical etchstop on diffused membranes;Marco;Sensors Mater.,1995
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4 articles.
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