Author:
Götz A.,Esteve J.,Bausells J.,Marco S.,Samitier J.,Morante J.R.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Fabrication and characterization of Si membranes;Palik;J. Electrochem. Soc.,1988
2. An investigation of the electrochemical etching of (100) silicon in CsOH and KOH;McNeil;Tech. Dig. IEEE Solid State Sensors and Actuators Workshop, Hilton Head Island, SC, USA,1990
3. Anisotropic etching of crystalline silicon in alkaline solutions. II. Influence of dopants;Seidel;J. Electrochem. Soc.,1990
4. Residual stress and mechanical properties of boron-doped p+ silicon films;Ding;Sensors and Actuators A,1990
5. A study on silicon-diaphragm buckling;Ding;Proc. IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA,1990
Cited by
16 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献