Author:
Kolesar Edward S,Ruff Matthew D,Odom William E,Jayachadran Joseph A,McAllister Justin B,Ko Simon Y,Howard Jeffery T,Allen Peter B,Wilken Josh M,Boydston Noah C,Bosch Jorge E,Wilks Richard J
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. Sensor Technology and Devices,1994
2. An electro-thermally and laterally driven polysilicon microactuator;Pan;J. Micromech. Microeng.,1997
3. Thermo-magnetic metal flexure actuators;Guckel,1992
4. Surface micromachined polysilicon thermal actuator arrays and applications;Comtois,1996
5. Thermal assembly of polysilicon microstructures;Fedder,1991
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