Microactuators: design and technology-Reference-Cited by-同舟云学术

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Microactuators: design and technology

Published:2014 Issue: Volume: Page:305-348
ISSN:
Container-title:Smart Sensors and Mems
language:
Short-container-title:

Author:

Li L.,Chew Z.J.

Publisher

Elsevier

Reference172 articles.

1. Introduction;Gad-el-Hak,2002

2. Microactuators and their technologies;Thielicke;Mechatronics,2000

3. Mechanical microsensors;Laermer,2005

4. Micro electro mechanical systems (MEMS);Vittorio,2001

5. Microactuators and micromachines;Fujita;Proceedings of the IEEE,1998

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