Crystallization behavior of thin ALD-Al2O3 films-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Crystallization behavior of thin ALD-Al2O3 films

Published:2003-02 Issue:1-2 Volume:425 Page:216-220
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Jakschik Stefan,Schroeder Uwe,Hecht Thomas,Gutsche Martin,Seidl Harald,Bartha Johann W.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Design of ion-implanted MOSFET's with very small physical dimensions

2. International Electron Devices Meeting 2001, Washington, DC, 2–5 December;Weis,2001

3. International Meeting Electron Devices 2001, Washington, DC, 2–5 December;Zhong,2001

4. International Electron Devices Meeting 1999,Washington, DC, 5–8 December;Gruening,1999

5. International Electron Devices Meeting 2001, Washington, DC, 2–5 December;Gutsche,2001

Cited by 246 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Low‐Temperature Poly‐Si Thin‐Film Transistor with High‐k ZrAlO_x Gate Insulator with SiO₂ Blocking Layer;Advanced Materials Technologies;2024-08-10

2. Low-Temperature Oxidation of Diesel Particulate Matter Using Dielectric Barrier Discharge Plasma;Plasma Chemistry and Plasma Processing;2024-07-10

3. Impact of NaOH solution surface treatment on Al₂O₃/β-Ga₂O₃ MOS capacitors;Semiconductor Science and Technology;2024-07-03

4. Interface‐Engineered Atomic Layer Deposition of 3D Li₄Ti₅O₁₂ for High‐Capacity Lithium‐Ion 3D Thin‐Film Batteries;Small;2024-06-08

5. Effect of rapid thermal annealing on DC performance of Mg_0.30Zn_0.70O/Cd_0.15Zn_0.85O MOSHFET;Semiconductor Science and Technology;2024-06-05

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3