In situ observations of the real-time stress-evolution and delamination of thin Ta films on Si(100)
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference28 articles.
1. Adhesion and fracture of tantalum nitride films
2. Phase formation behavior and diffusion barrier property of reactively sputtered tantalum-based thin films used in semiconductor metallization
3. Stress–temperature behavior of unpassivated thin copper films
4. Compressive Stress Increase With Repeated Thermal Cycling in Tantalum(Oxygen) Thin Films
5. The relationship between deposition conditions, the beta to alpha phase transformation, and stress relaxation in tantalum thin films
Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Studies on the Morphological and Mechanical Properties of TiZrHfNiCuCo Metallic Coatings Deposited by DC Magnetron Sputtering;Coatings;2024-09-12
2. Influence of tantalum's crystal phase growth on the microstructural, electrical and mechanical properties of sputter-deposited tantalum thin film layer;International Journal of Refractory Metals and Hard Materials;2020-11
3. Influence of N2 Gas Flow Ratio and Working Pressure on Amorphous Mo–Si–N Coating during Magnetron Sputtering;Coatings;2020-01-01
4. Structural and Mechanical Properties of AlCoCrNi High Entropy Nitride Films: Influence of Process Pressure;Coatings;2019-12-21
5. Wide variation in the structure and physical properties of reactively sputtered (TiZrHf)N coatings under different working pressures;Journal of Alloys and Compounds;2018-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3