Influence of tantalum's crystal phase growth on the microstructural, electrical and mechanical properties of sputter-deposited tantalum thin film layer-Reference-Cited by-同舟云学术

Influence of tantalum's crystal phase growth on the microstructural, electrical and mechanical properties of sputter-deposited tantalum thin film layer

Published:2020-11 Issue: Volume:92 Page:105314
ISSN:0263-4368
Container-title:International Journal of Refractory Metals and Hard Materials
language:en
Short-container-title:International Journal of Refractory Metals and Hard Materials

Author:

Latif Rhonira,Jaafar Muhammad Fahmi,Aziz Mohd Faizal,Zain Ahmad Rifqi Md,Yunas Jumril,Majlis Burhanuddin Yeop

Funder

Universiti Kebangsaan Malaysia

Centre of Research and Instrumentations

Publisher

Elsevier BV

Subject

General Medicine

Reference43 articles.

1. Phase formation behavior and diffusion barrier property of reactively sputtered tantalum-based thin films used in semiconductor metallization;Chena;Thin Solid Films,1999

2. Internal stress minimization in the fabrication of transmissive multilayer x-ray optics;Jankowski;J. Vac. Sci. Technol. A,1989

3. Tantalum films for protective coatings of steel;Gladczuk;Thin Solid Films,2004

4. Electrochemical corrosion behavior of nanocrystalline β-Ta coating for biomedical applications;Liu;ACS Biomater. Sci. Eng.,2016

5. Effect of sputtering parameters on Ta coatings for gun bore applications;Matson;Surf. Coat. Technol.,2000

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