Relation between mechanical and structural properties of silicon-incorporated hard a-C:H films-Reference-Cited by-同舟云学术

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Relation between mechanical and structural properties of silicon-incorporated hard a-C:H films

Published:1997-01 Issue:1-2 Volume:293 Page:206-211
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Baia Neto A.L.,Santos R.A.,Freire F.L.,Camargo S.S.,Carius R.,Finger F.,Beyer W.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Plasma Deposited Thin Films;Angus,1986

2. Hard amorphous (diamond-like) carbons

3. The deposition mechanism of diamond-like a-C and a-C: H

4. The deposition and study of hard carbon films

5. Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin films

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