Characterization of ultra-hard silicon carbide coatings deposited by RF magnetron sputtering-Reference-Cited by-同舟云学术

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Characterization of ultra-hard silicon carbide coatings deposited by RF magnetron sputtering

Published:2000-12 Issue: Volume:377-378 Page:243-248
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Costa A.K,Camargo S.S,Achete C.A,Carius R

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. The materials science of thin films;Ohring,1992

2. Low-temperature formation of β-silicon carbide

3. Spectroscopic characterization of thermally treated carbon-rich Si1−xCx films

4. Corrosion protection of an AISI 321 stainless steel by SiC coatings

5. Formation of epitaxial diamond-silicon carbide heterojunctions

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3. Structural and Electrical Transport Properties of Sputter-Deposited SiC Thin Films;Journal of Physics: Conference Series;2023-06-01

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