Structural and mechanical properties of amorphous Si–C-based thin films deposited by pulsed magnetron sputtering under different sputtering powers
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference41 articles.
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2. The adhesion strength and deuterium permeation property of SiC films synthesized by magnetron sputtering;Wu;Int. J. Hydrogen Energy,2016
3. Microstructure and properties of SiC-coated carbon fibers prepared by radio frequency magnetron sputtering;Cheng;Appl. Surf. Sci.,2016
4. Coating SiC on Zircaloy-4 by magnetron sputtering at room temperature;Bao;J. Alloy. Compd,2018
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