Author:
Feng Y,Zhu M,Liu F,Liu J,Han H,Han Y
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
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2. Substrate dependence of initial growth of microcrystalline silicon in plasma‐enhanced chemical vapor deposition
3. Preparation of ultrathin microcrystalline silicon layers by atomic hydrogen etching of amorphous silicon and end‐point detection by real time spectroellipsometry
4. New Hydrogen Distribution ina-Si:H: An NMR Study
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