Investigation of the formation of M2+-molecular ions in sputtering processes-Reference-Cited by-同舟云学术

Investigation of the formation of M2+-molecular ions in sputtering processes

Published:1999-03-01 Issue:3 Volume:10 Page:246-253
ISSN:1044-0305
Container-title:Journal of the American Society for Mass Spectrometry
language:en
Short-container-title:J. Am. Soc. Mass Spectrom.

Author:

Vlekken Johan¹,Croes Kristof¹,Wu Ting-Di¹,D’Olieslaeger Marc¹,Knuyt Gilbert¹,Vandervorst Wilfried²,De Schepper Luc¹

Affiliation:

1. Institute for Materials Research, Materials Physics Division, Limburgs Universitair Centrum, Universitaire Campus, Wetenschapspark 1, Diepenbeek, Belgium

2. IMEC v. z. w., Kapeldreef 75, B-3001, Leuven, Belgium

Publisher

American Chemical Society (ACS)

Subject

Spectroscopy,Structural Biology

Link

https://pubs.acs.org/doi/pdf/10.1016/S1044-0305%2898%2900143-3

Reference16 articles.

1. Quantitation of major elements with secondary ion mass spectrometry by using M2+-molecular ions

2. Oechsner, H. SIMS III Proceedings1982New YorkSpringer-Verlag106106

3. Monte Carlo simulation of the formation of MCs+ molecular ions

4. Theoretical electronic state and angular resolved kinetic energy distributions of sputtered diatomic molecules

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