Investigation of the formation process of MCs+-molecular ions during sputtering-Reference-Cited by-同舟云学术

Investigation of the formation process of MCs+-molecular ions during sputtering

Published:2000-07-01 Issue:7 Volume:11 Page:650-658
ISSN:1044-0305
Container-title:Journal of the American Society for Mass Spectrometry
language:en
Short-container-title:J. Am. Soc. Mass Spectrom.

Author:

Vlekken Johan¹,D’Olieslaeger Marc¹,Knuyt Gilbert¹,Vandervorst Wilfried²,De Schepper Luc¹

Affiliation:

1. Limburgs Universitaire Centrum, Institute for Materials Research, Materials Physics Division, Universitaire Campus, Wetenschapspark 1, B-3590, Diepenbeek, Belgium

2. IMEC v.z.w., Leuven, Belgium

Publisher

American Chemical Society (ACS)

Subject

Spectroscopy,Structural Biology

Link

https://pubs.acs.org/doi/pdf/10.1016/S1044-0305%2800%2900130-6

Reference35 articles.

1. A new secondary ion mass spectrometry technique for III‐V semiconductor compounds using the molecular ions CsM+

2. Use of secondary molecular ions in Cs-SIMS elemental analysis

3. On the use of CsX+ cluster ions for major element depth profiling in secondary ion mass spectrometry

4. SIMS depth profile analysis using MCs+ molecular ions

5. Noval detection scheme for the analysis of hydrogen and helium by secondary ion mass spectrometry

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Quantitative aspects of ToF-SIMS analysis of metals and alloys in a UHV, O2 and H2 atmosphere;Surfaces and Interfaces;2024-06

2. Quantitative Aspects of Tof-Sims Analysis of Metals and Alloys in a Uhv, O2 and H2 Atmosphere;2024

3. ToF-SIMS Depth Profiling of Metal, Metal Oxide, and Alloy Multilayers in Atmospheres of H2, C2H2, CO, and O2;Journal of the American Society for Mass Spectrometry;2021-12-22

4. MCsn+-SIMS: An Innovative Approach for Direct Compositional Analysis of Materials without Standards;Energy Procedia;2013

5. Quantitative MCsn+ - SIMS for direct compositional analysis of interfaces of low-dimensional structures;AIP Conference Proceedings;2012