Low temperature polycrystalline silicon thin film transistors
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference38 articles.
1. Effects of temperature and electrical stress on the performance of thin‐film transistors fabricated from undoped low‐pressure chemical vapor deposited polycrystalline silicon
2. Crystallized Si films by low‐temperature rapid thermal annealing of amorphous silicon
3. Pulsed laser‐induced amorphization of silicon films
4. Insitutransmission electron microscopy studies of silicide‐mediated crystallization of amorphous silicon
5. Structural properties of polycrystalline silicon films prepared at low temperature by plasma chemical vapor deposition
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