Thermal stability of NbN films deposited on GaAs substrates
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference6 articles.
1. Reactive magnetron sputter deposition of niobium nitride films
2. HighTcsuperconducting NbN films deposited at room temperature
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5. Thermal stability and barrier height enhancement for refractory metal nitride contacts on GaAs
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3. TiNbN Hard Coating Deposited at Varied Substrate Temperature by Cathodic Arc: Tribological Performance under Simulated Cutting Conditions;Materials;2023-06-22
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5. Morphological and Structural Properties of NbN Thin Films Deposited by Pulsed Laser Deposition;Advanced Materials Research;2012-01
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