CxFy polymer film deposition in DC and RF fluorinert vapor plasmas
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference11 articles.
1. CF2 production and loss mechanisms in fluorocarbon discharges: Fluorine-poor conditions and polymerization
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3. 2–10 nm scale plasma polymerized organic films
4. Controlling Fluorine Concentration of Fluorinated Amorphous Carbon Thin Films for Low Dielectric Constant Interlayer Dielectrics
5. Decomposition of fluorocarbon gaseous contaminants by surface discharge-induced plasma chemical processing
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