Author:
Kim Il-Kyoung,Kim Woo-Seung
Subject
Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics
Reference14 articles.
1. Low pressure CVD processes for poly, nitride, and oxide;Rosler;Solid State Technology,1977
2. VLSI Technology;Sze,1988
3. Spectral emissivity of silicon;Sato;Japanese Journal of Applied Physics,1967
4. Temperature distribution and stresses in circular wafers in a row during radiative cooling;Hu;Journal of Applied Physics,1969
5. Modeling and control of the wafer temperatures in a diffusion furnace;Van Schravendijk;Journal of Applied Physics,1987
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