Author:
Chen Chun-Yu,Chang Kuo-Chi,Wang Gwo-Bin
Funder
National Science Foundation, ROC (Taiwan)
Subject
Industrial and Manufacturing Engineering,Management Science and Operations Research,Energy Engineering and Power Technology,Safety, Risk, Reliability and Quality,General Chemical Engineering,Food Science,Control and Systems Engineering
Reference22 articles.
1. a412 Installation manual;ASM Company,2008
2. Thermal modeling of tubular horizontal hot-wall low pressure chemical vapor deposition reactors;Azzaro;Chemical Engineering Journal,1995
3. Modeling the wafer temperature profile in a multiwafer LPCVD furnace;Badgwell;Journal of the Electrochemical Society,1994
4. Inherently safer design study on boiler equipment of power plant operation hazard prevention;Chang;Chemical Engineering Technology,2006
5. A study for inherently safer design and application on high-tech industrial;Chang;Industrial Safety Technology Quarterly,2007
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