Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times
Author:
Publisher
Elsevier BV
Subject
Management Science and Operations Research,Modeling and Simulation,General Computer Science
Reference49 articles.
1. Integrated processing equipment;Bader;Solid State Technol,1990
2. Coping with the high cost of wafer fabs;Burggraaf;Semicond Int,1995
3. Optimal scheduling of multicluster tools with constant robot moving times, Part I: two-cluster analysis;Chan;IEEE Trans Autom Sci Eng,2011
4. A polynomial algorithm for no-wait cyclic hoist scheduling in an extended electroplating line;Che;Oper Res Lett,2005
5. Cyclic hoist scheduling in large real-life electroplating lines;Che;OR Spectr,2007
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