Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time-Reference-Cited by-同舟云学术

Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time

Author:

Wang Jufeng¹^ORCID,Liu Chunfeng²^ORCID,Zhou MengChu³^ORCID,Leng Tingting⁴,Albeshri Aiiad⁵^ORCID

Affiliation:

1. College of Science, China Jiliang University, Hangzhou, China

2. School of Management, Hangzhou Dianzi University, Hangzhou, China

3. Helen and John C. Hartmann Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ, USA

4. Department of Mathematics, China Jiliang University, Hangzhou, China

5. Department of Computer Science, King Abdulaziz University, Jeddah, Saudi Arabia

Funder

Humanities and Social Sciences Planned Foundation of the PRC Ministry of Education

Ministry of Science and Higher Education of the Russian Federation as part of World-Class Research Center Program: Advanced Digital Technologies

Deanship of Scientific Research (DSR) at King Abdulaziz University, Jeddah, Saudi Arabia

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

Reference47 articles.

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