Funder
National Science Council Taiwan
NSC Semiconductor Technologies Empowerment Partners Consortium
Ministry of Education
Hsinchu Science Park
Macronix International Ltd., Taiwan
Subject
Management Science and Operations Research,Modeling and Simulation,General Computer Science
Reference47 articles.
1. Cramming more components onto integrated circuits;Moore;Electron Mag,1965
2. Fundamentals of semiconductor manufacturing and process control;May,2006
3. Advanced process control of the critical dimension in photolithography;Wu;Int J Precis Eng Manuf,2008
4. Benchmark study of run-to-run controllers for the lithographic control of the critical dimension;Mao;J Micro/Nanolithogr, MEMS and MOEMS,2007
5. Addressing dynamic process changes in high volume plasma etch manufacturing by using multivariate process control;Parkinson;IEEE Trans Semicond Manuf,2010
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