Funder
Northwestern Polytechnical University
National Key Research and Development Program of China
National Natural Science Foundation of China
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,Environmental Chemistry,General Chemistry
Reference29 articles.
1. Challenges and strategies in high-accuracy manufacturing of the world’s largest SiC aspheric mirror, Light: Sci;Zhang;Appl.,2022
2. The structural evolution of light-ion implanted 6H-SiC single crystal: Comparison of the effect of helium and hydrogen;Daghbouj;Acta Mater.,2020
3. Recent advances in free-standing single crystalline wide band-gap semiconductors and their applications: GaN, SiC, ZnO, β-Ga2O3, and diamond;Kim;J. Mater. Chem. C,2017
4. Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography;Bekker;Appl. Phys. Lett.,2023
5. Lithography and etching-free microfabrication of silicon carbide on insulator using direct UV laser ablation;Nguyen;Adv. Eng. Mater.,2020
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