A new strategy for defect inspection by the virtual inspection in semiconductor wafer fabrication

Author:

Pan Jason Chao-Hsien,Tai Damon HE

Publisher

Elsevier BV

Subject

General Engineering,General Computer Science

Reference40 articles.

1. Adamson, T., Moore, G., Passow, M., Wong, J., & Xu, Y. (2006). Strategies for successfully implementing fab-wide FDC methodologies in semiconductor manufacturing. In Proceedings of the AEC/APC symposium XVIII. Westminster, CO.

2. Braun, A. E. (2000). Defect detection technology transitions, keeps up. Semiconductor international. .

3. Defect inspection enters integration era;Braun;Semiconductor International,2001

4. Chang, Y. J., Kang, Y., Hsu, C. L., Chang, C. T., & Chan, T. Y. (2006). Virtual metrology technique for semiconductor manufacturing. In Proceedings of 2006 international joint conference on neural networks (IJCNN’06) (pp. 5289–5293).

5. Cheng, F. T., & Chang, Y. C. (2005). Application development of virtual metrology in semiconductor industry. In Proceedings of the 31st annual conference of the IEEE industrial electronics (IECON 2005). Raleigh, North Carolina, USA (pp. 124–129).

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