Fabrication of micro-mold for glass embossing using focused ion beam, femto-second laser, eximer laser and dicing techniques-Reference-Cited by-同舟云学术

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Fabrication of micro-mold for glass embossing using focused ion beam, femto-second laser, eximer laser and dicing techniques

Published:2007-06 Issue: Volume:187-188 Page:326-330
ISSN:0924-0136
Container-title:Journal of Materials Processing Technology
language:en
Short-container-title:Journal of Materials Processing Technology

Author:

Youn S.W.,Takahashi M.,Goto H.,Maeda R.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modelling and Simulation,Ceramics and Composites

Reference13 articles.

1. Deep reactive ion etching of Pyrex glass using SF6 plasma;Li;Sens. Actuators A,2001

2. Design and fabrication of tungsten carbide mould with micropatterns imprinted by microlithography;Choi;J. Micromech. Microeng.,2004

3. Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution;Iliescu;Surf. Coat. Technol.,2005

4. Nanoimprint of glass materials with glassy carbon molds fabricated by focused-ion-beam etching;Takahashi;Jpn. J. Appl. Phys.,2005

5. Fine pattern fabrication on glass surface by imprint lithography;Hirai;Microelectron. Eng.,2003

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3. Structural Evolution in Glassy Carbon Investigated Based on the Temperature Dependence of Young’s Modulus;Materials;2023-07-03

4. Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing;Journal of Laser Micro/Nanoengineering;2023-06

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