An exact algorithm for self-calibration of two-dimensional precision metrology stages-Reference-Cited by-同舟云学术

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An exact algorithm for self-calibration of two-dimensional precision metrology stages

Published:1997-01 Issue:1 Volume:20 Page:16-32
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Ye J.,Takac M.,Berglund C.N.,Owen G.,Pease R.F.

Publisher

Elsevier BV

Subject

General Engineering

Reference10 articles.

1. MEBES User's Manual. ETEC Systems

2. On characterizing measuring machine technology;Hocken,1979

3. Calibration algorithms for an electron beam lithography system;Lawson;Microelec Eng,1983

4. A method of calibrating a two-dimensional reference plate;Reeve,1979

5. Absolute two-dimensional sub-micron metrology for electron beam lithography: A theory of calibration with applications;Raugh;Prec Eng,1985

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1. A self-calibration scheme for two-dimensional free-form probing measurement under the assumption of rigid-body machine kinematic model;Measurement;2023-11

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3. Measurement and correction of lateral distortion in a Fizeau interferometer based on the self-calibration technique;Optics Express;2022-09-19

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