Precision positioning of a DC-motor-driven aerostatic slide system-Reference-Cited by-同舟云学术

Precision positioning of a DC-motor-driven aerostatic slide system

Published:2003-01 Issue:1 Volume:27 Page:32-41
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Mao Junhong,Tachikawa Hiroyuki,Shimokohbe Akira

Publisher

Elsevier BV

Subject

General Engineering

Reference19 articles.

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2. Sornsuwit N, Takeuchi Y, Kawai T, Sawada K, Sata T. Manufacture of Fresnel lens by ultraprecision machining center based on friction-free servo mechanism. In: Proceedings of Ninth ICPE, Osaka, Japan; 1999, p. 159–64.

3. Ultra precision positioning using air bearing lead screw;Tachikawa;Trans. JSME Ser. C,2000

4. A survey of models, analysis tools, and compensation methods for the control of machines with friction;Armstrong-Helouvry;Automatica,1994

5. Nanometer positioning and its micro-dynamics;Futami;Nanotechnology,1990

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