Spectroscopic ellipsometry of oxides and interfaces thermally formed on (100)Si and (111)Si
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference18 articles.
1. VLSI Technology;Katz,1987
2. H-terminated silicon: spectroscopic ellipsometry measurements correlated to the surface electronic properties
3. Oxidation kinetics of hydrogen-enriched Si(100) and Si(111) surfaces
4. Variable wavelength, variable angle ellipsometry including a sensitivities correlation test
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