Variable wavelength, variable angle ellipsometry including a sensitivities correlation test-Reference-Cited by-同舟云学术

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Variable wavelength, variable angle ellipsometry including a sensitivities correlation test

Published:1986-04 Issue:1 Volume:138 Page:27-41
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Bu-Abbud G.H.,Bashara N.M.,Woollam John A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Proc. Symp. on Ellipsometry in the Measurement of Surfaces and Thin Films, NBS Publ. 256;McCrackin,1964

2. POLARIMETRIC DETERMINATION OF ABSORPTION SPECTRA OF THIN FILMS ON METAL. I. INTERPRETATION OF OPTICAL DATA1,2

3. Error in Dielectric-Film Ellipsometer Determinations due to Neglect of Film Absorption*

4. Multiple-Angle-of-Incidence Ellipsometry of Very Thin Films*

5. Error analysis of angle of incidence measurements

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