Author:
Klaus J.W,Ott A.W,Dillon A.C,George S.M
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference21 articles.
1. The National Technology Roadmap for Semiconductors, SIA Semiconductor Industry Association 4300 Stevens Creek Boulevard, San Jose, CA 95129, USA (http://www.sematech.org/public/roadmap/index.htm), 1997.
2. Surface Chemistry for Atomic Layer Growth
3. Atomic layer epitaxy
4. Atomic layer epitaxy
5. Silicon Nitride in Semiconductor Device Technology
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